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Vacuum Measurement

Vacuum Measurement

Vacuum Measurement

Rugged, stable capacitance manometers for process vacuum measurement

Brooks capacitance manometers incorporate industry-leading features that combine to improve measurement reliability, minimize drift, resist diaphragm contamination, and minimize thermal effects. The result is an exceptionally reliable capacitance manometer family for all vacuum measurement applications.

An important benefit of a Brooks capacitance manometer is its advanced Mark-IV sensor. The sensor chamber contains surface areas that are not used in the pressure measurement; these surfaces provide locations for particles and condensable vapors to accumulate without affecting the sensor, dramatically reducing the need for re-zeroing and greatly extending sensor life. The sensor diaphragm is made from corrosion-resistant Inconel®.

Brooks offers truly digital capacitance manometers that operate over a wide dynamic range with extremely good accuracy.

XacTorr™ CMX Series (Heated Gauges)

The XacTorr CMX series gauges are premium heated gauges that use patented, dual-zone heating to ensure 0.1 °C temperature uniformity. The sensor very quickly recovers from thermal events and is virtually immune to ambient temperature changes. Three operating temperatures are offered, 45 °C, 100 °C and 160 °C, with full-scale measurement ranges from 100 milliTorr to 1000 Torr.

The gauges include an RS485 dataport that enables in situ monitoring and troubleshooting without disturbing communication with the vacuum chamber control system. XacTorr CMX devices offer RS485, DeviceNet or analog 0 – 10 Vdc communication.

Vacuum Measurement Table1

Brooks Instrument

www.brooksinstrument.com

Global Headquarters

 Brooks Instrument

407 West Vine Street

Hatfield, PA 19440-0903 USA

Toll-free (USA): 888-554-FLOW

T: 215-362-3700

F: 215-362-3745 BrooksAM@BrooksInstrument.com

France (Level Products)

 Brooks Instrument

Z.A. da la Tour

03200 Abrest

France

T: +33 (0) 470 598181

F: +33 (0) 470 599637

China

 Brooks Instrument China

Room 203, Building 6

No. 1888 Xin Jin Qiao Road

Jin Qiao E.P.Z. Pu Dong

Shanghai 201206 China

T: +86 (21) 3872 0770

F: +86 (21) 3872 0771

India

 Brooks Instrument India Pvt Ltd

301, 3rd Floor

A to Z Industrial Estate

Ganpatrao Kadam Marg

Lower Parel, Mumbai 400 013

Maharashtra, India

T: +91 (22) 6627 0780

F: +91 (22) 6627 0780 Extn: 8

Germany

 Brooks Instrument

Zur Wetterwarte 50

Gebaude 337/B

01109 Dresden Germany

T: +49 (0) 351 2152 040

F: +49 (0) 351 2152 0425

Europe, Middle East & Africa

Brooks Instrument

Neonstraat 3

6718 WX Ede

Netherlands

T: +31 (0) 318 549300

F: +31 (0) 318 549309 BrooksEU@BrooksInstrument.com

Japan

 Brooks Instrument Japan

1-4-4 Kitasuna Koto-Ku

Tokyo, 136-0073 Japan

T: +81 (3) 5633 7100

F: +81 (3) 5633 7101

BrooksAS@BrooksInstrument.com

Singapore

 Brooks Instrument Singapore

18 Boon Lay Way

#04-136 Tradehub 21

Singapore 609966

T: +65 6595 5168

F: +65 6595 5169

BrooksAS@BrooksInstrument.com

Korea

Brooks Instrument Korea

D-406, Bundang Techno Park

#151 Yatap-dong, Bundang ku

Sungnam-Shi

Kyungki-do, Korea 463-050

T: +82 (31) 708 2521

F: +82 (31) 708 2595

 

 

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