Home » Brooks Instrument » Ultrasonic Liquid Flow Controllers

Ultrasonic Liquid Flow Controllers


Ultrasonic Liquid Flow Controllers

Ultrasonic Liquid Flow Controllers

Advanced Ultrasonic Liquid Flow Controllers

Brooks’ LF200 Series liquid flow controllers feature an all-PFA wetted flow path that is chemically inert and solvent-resistant to virtually all chemicals, making the LF200 ideal for controlling flows of high purity and ultra-high purity liquids, deionized (and other highly pure) water, acids, bases and similar fluids. In addition, the flow path is straight, permitting the LF200 liquid flow controller to measure complex dual-phase fluids like CMP slurries without imparting any shear force that could damage the fluid or cause agglomeration. The LF200 liquid flow controller employs a bi-directional, ultrasonic transit-time measurement technique and advanced signal processing algorithms to provide highly accurate flow measurement and control even in the presence of bubbles. Needle valve and pinch valve options are available.

  • Chemically inert flow path
  • Straight flow path with no bends or sharp turns
  • Very compact size
  • +/-1% rate accuracy available

Ultrasonic Liquid Flow Controllers2

The LF200 Series liquid flow controller ultrasonic measurement system features a proprietary sensor design that enables extremely high measurement precision. Even for a very low flow rate, such as 50 ml/min, the LF200 liquid flow controller can control flow to +/-0.5 ml/min. High-speed digital signal processing provides <2 second response time; with field tuning, <1 second response time is possible. The user interface features a high-visibility LCD that provides selectable local indication of flow, temperature, firmware revision or network address. A zero button provides a simple means to re-zero the liquid flow controller when flow is stopped. Several analog I/O options are available.

Ultrasonic Liquid Flow Controllers Table1

Brooks Instrument


Global Headquarters

 Brooks Instrument

407 West Vine Street

Hatfield, PA 19440-0903 USA

Toll-free (USA): 888-554-FLOW

T: 215-362-3700

F: 215-362-3745 BrooksAM@BrooksInstrument.com

France (Level Products)

 Brooks Instrument

Z.A. da la Tour

03200 Abrest


T: +33 (0) 470 598181

F: +33 (0) 470 599637


 Brooks Instrument China

Room 203, Building 6

No. 1888 Xin Jin Qiao Road

Jin Qiao E.P.Z. Pu Dong

Shanghai 201206 China

T: +86 (21) 3872 0770

F: +86 (21) 3872 0771


 Brooks Instrument India Pvt Ltd

301, 3rd Floor

A to Z Industrial Estate

Ganpatrao Kadam Marg

Lower Parel, Mumbai 400 013

Maharashtra, India

T: +91 (22) 6627 0780

F: +91 (22) 6627 0780 Extn: 8


 Brooks Instrument

Zur Wetterwarte 50

Gebaude 337/B

01109 Dresden Germany

T: +49 (0) 351 2152 040

F: +49 (0) 351 2152 0425

Europe, Middle East & Africa

Brooks Instrument

Neonstraat 3

6718 WX Ede


T: +31 (0) 318 549300

F: +31 (0) 318 549309 BrooksEU@BrooksInstrument.com


 Brooks Instrument Japan

1-4-4 Kitasuna Koto-Ku

Tokyo, 136-0073 Japan

T: +81 (3) 5633 7100

F: +81 (3) 5633 7101



 Brooks Instrument Singapore

18 Boon Lay Way

#04-136 Tradehub 21

Singapore 609966

T: +65 6595 5168

F: +65 6595 5169



Brooks Instrument Korea

D-406, Bundang Techno Park

#151 Yatap-dong, Bundang ku


Kyungki-do, Korea 463-050

T: +82 (31) 708 2521

F: +82 (31) 708 2595


This text was reproduced under the Creative Commons Attribution/Share-Alike License; additional terms may apply. See Terms of use for details

See also:


Leave a Reply

Fill in your details below or click an icon to log in:

WordPress.com Logo

You are commenting using your WordPress.com account. Log Out /  Change )

Google+ photo

You are commenting using your Google+ account. Log Out /  Change )

Twitter picture

You are commenting using your Twitter account. Log Out /  Change )

Facebook photo

You are commenting using your Facebook account. Log Out /  Change )


Connecting to %s

%d bloggers like this: