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Ultrasonic Liquid Flow Controllers

Ultrasonic Liquid Flow Controllers

Ultrasonic Liquid Flow Controllers

Advanced Ultrasonic Liquid Flow Controllers

Brooks’ LF200 Series liquid flow controllers feature an all-PFA wetted flow path that is chemically inert and solvent-resistant to virtually all chemicals, making the LF200 ideal for controlling flows of high purity and ultra-high purity liquids, deionized (and other highly pure) water, acids, bases and similar fluids. In addition, the flow path is straight, permitting the LF200 liquid flow controller to measure complex dual-phase fluids like CMP slurries without imparting any shear force that could damage the fluid or cause agglomeration. The LF200 liquid flow controller employs a bi-directional, ultrasonic transit-time measurement technique and advanced signal processing algorithms to provide highly accurate flow measurement and control even in the presence of bubbles. Needle valve and pinch valve options are available.

  • Chemically inert flow path
  • Straight flow path with no bends or sharp turns
  • Very compact size
  • +/-1% rate accuracy available

Ultrasonic Liquid Flow Controllers2

The LF200 Series liquid flow controller ultrasonic measurement system features a proprietary sensor design that enables extremely high measurement precision. Even for a very low flow rate, such as 50 ml/min, the LF200 liquid flow controller can control flow to +/-0.5 ml/min. High-speed digital signal processing provides <2 second response time; with field tuning, <1 second response time is possible. The user interface features a high-visibility LCD that provides selectable local indication of flow, temperature, firmware revision or network address. A zero button provides a simple means to re-zero the liquid flow controller when flow is stopped. Several analog I/O options are available.

Ultrasonic Liquid Flow Controllers Table1

Brooks Instrument

www.brooksinstrument.com

Global Headquarters

 Brooks Instrument

407 West Vine Street

Hatfield, PA 19440-0903 USA

Toll-free (USA): 888-554-FLOW

T: 215-362-3700

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T: +86 (21) 3872 0770

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301, 3rd Floor

A to Z Industrial Estate

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Lower Parel, Mumbai 400 013

Maharashtra, India

T: +91 (22) 6627 0780

F: +91 (22) 6627 0780 Extn: 8

Germany

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Zur Wetterwarte 50

Gebaude 337/B

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T: +49 (0) 351 2152 040

F: +49 (0) 351 2152 0425

Europe, Middle East & Africa

Brooks Instrument

Neonstraat 3

6718 WX Ede

Netherlands

T: +31 (0) 318 549300

F: +31 (0) 318 549309 BrooksEU@BrooksInstrument.com

Japan

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1-4-4 Kitasuna Koto-Ku

Tokyo, 136-0073 Japan

T: +81 (3) 5633 7100

F: +81 (3) 5633 7101

BrooksAS@BrooksInstrument.com

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18 Boon Lay Way

#04-136 Tradehub 21

Singapore 609966

T: +65 6595 5168

F: +65 6595 5169

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Korea

Brooks Instrument Korea

D-406, Bundang Techno Park

#151 Yatap-dong, Bundang ku

Sungnam-Shi

Kyungki-do, Korea 463-050

T: +82 (31) 708 2521

F: +82 (31) 708 2595

 

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