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Liquid Vaporizer Systems

Liquid Vaporizer Systems

Breakthrough Vaporization Solutions for All Liquid-to-Vapor Applications

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           The Brooks family of extremely high-performing direct liquid injection (DLI) vaporizer solutions is designed for customers who require reliable liquid vaporization. Featuring unique atomization and heat exchanger technologies, Brooks direct liquid injection vaporizers deliver pure vapor for every application. Applications include:

Water vaporization for fuel cell stack humidification and many other water addition applications
Liquid precursor vaporization for chemical vapor deposition (CVD), metal oxide chemical vapor deposition (MOCVD), and atomic layer deposition (ALD)
Depositing thin films for enhanced thermal, optical, or hardness characteristics such as diamond-like carbon coating and glass coating
Vaporizing monomers for vacuum polymer film deposition
Generating calibration vapor
Vaporizing liquid hydrocarbons
• Many more.

      Brooks’ direct liquid injection vaporizer technology overcomes the many limitations of conventional vaporizing technologies. Bubblers, or vapor draw systems, are difficult to start and stop, require very close control of temperature and pressure, and are inefficient at generating well controlled vapor mass flow. Vaporizing valves, hot frit, heat tracing, and other “flash vaporizers” that apply heat to the liquid using a hot metal surface are also inefficient at generating vapor mass and frequently can cause thermal decomposition of the liquid precursor. None of these conventional technologies can eliminate the potential for liquid carry-over and its attendant problems. Figure 1 on page 2 illustrates CVD deposition chamber pressure fluctuations caused by incomplete vaporization and precursor carry-over from a conventional vaporizer.

 Fig1

Fig2

         Furthermore, it is very challenging to determine precisely how much vapor mass is actually being delivered from a conventional vaporizer. In applications that require precise vapor mass addition, users must turn to secondary measurement/control devices such as vapor mass flow controllers, increasing the cost and complexity of the vapor module.

Brooks Instrument

www.brooksinstrument.com

Global Headquarters

 Brooks Instrument

407 West Vine Street

Hatfield, PA 19440-0903 USA

Toll-free (USA): 888-554-FLOW

T: 215-362-3700

F: 215-362-3745 BrooksAM@BrooksInstrument.com

France (Level Products)

 Brooks Instrument

Z.A. da la Tour

03200 Abrest

France

T: +33 (0) 470 598181

F: +33 (0) 470 599637

China

 Brooks Instrument China

Room 203, Building 6

No. 1888 Xin Jin Qiao Road

Jin Qiao E.P.Z. Pu Dong

Shanghai 201206 China

T: +86 (21) 3872 0770

F: +86 (21) 3872 0771

India

 Brooks Instrument India Pvt Ltd

301, 3rd Floor

A to Z Industrial Estate

Ganpatrao Kadam Marg

Lower Parel, Mumbai 400 013

Maharashtra, India

T: +91 (22) 6627 0780

F: +91 (22) 6627 0780 Extn: 8

Germany

 Brooks Instrument

Zur Wetterwarte 50

Gebaude 337/B

01109 Dresden Germany

T: +49 (0) 351 2152 040

F: +49 (0) 351 2152 0425

Europe, Middle East & Africa

Brooks Instrument

Neonstraat 3

6718 WX Ede

Netherlands

T: +31 (0) 318 549300

F: +31 (0) 318 549309 BrooksEU@BrooksInstrument.com

Japan

 Brooks Instrument Japan

1-4-4 Kitasuna Koto-Ku

Tokyo, 136-0073 Japan

T: +81 (3) 5633 7100

F: +81 (3) 5633 7101

BrooksAS@BrooksInstrument.com

Singapore

 Brooks Instrument Singapore

18 Boon Lay Way

#04-136 Tradehub 21

Singapore 609966

T: +65 6595 5168

F: +65 6595 5169

BrooksAS@BrooksInstrument.com

Korea

Brooks Instrument Korea

D-406, Bundang Techno Park

#151 Yatap-dong, Bundang ku

Sungnam-Shi

Kyungki-do, Korea 463-050

T: +82 (31) 708 2521

F: +82 (31) 708 2595

 

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