Home » Brooks Instrument » Thermal Mass Flow Controllers and Meters

Thermal Mass Flow Controllers and Meters


Thermal Mass Flow Controllers and Meters

Thermal Mass Flow Controllers and Meters

Brooks offers a broad range of thermal mass flow controllers (MFCs) and meters, ensuring that we will have exactly the right device for your application. Our mass flow controllers are the acknowledged industry leader in quality and reliability, with many devices in operation for more than 20 years.

Brooks thermal mass flow devices provide significant advantages in long term stability, response time, accuracy, repeatability, turndown, self-diagnostics and application flexibility. The Brooks portfolio covers the widest range of options to meet your application needs, including:

  • Pressure transient insensitive MFCs (an industry first)
  • MultiFlo™ (i.e., multi-gas and multi-range) capability to satisfy a broad range of applications with one device without removing device from system (an industry first)
  • Foundation™ Fieldbus communications option (an industry first)
  • NEMA 4X/IP66 MFCs for hose down/wash down applications (an industry first)
  • Ultra-high purity devices for the vacuum, thin film, solar and semiconductor industry
  • Class1 Div 2/Zone 2 approved devices for use in hazardous areas
  • Downport MFCs for ease of maintenance and reduced gas panel footprint

Plus, we have the best trained and most responsive flow experts with application experience in virtually every industry, all over the world. They make sure your thermal mass flow controller is selected correctly and maintained properly.

Brooks Instrument


Global Headquarters

 Brooks Instrument

407 West Vine Street

Hatfield, PA 19440-0903 USA

Toll-free (USA): 888-554-FLOW

T: 215-362-3700

F: 215-362-3745 BrooksAM@BrooksInstrument.com

France (Level Products)

 Brooks Instrument

Z.A. da la Tour

03200 Abrest


T: +33 (0) 470 598181

F: +33 (0) 470 599637


 Brooks Instrument China

Room 203, Building 6

No. 1888 Xin Jin Qiao Road

Jin Qiao E.P.Z. Pu Dong

Shanghai 201206 China

T: +86 (21) 3872 0770

F: +86 (21) 3872 0771


 Brooks Instrument India Pvt Ltd

301, 3rd Floor

A to Z Industrial Estate

Ganpatrao Kadam Marg

Lower Parel, Mumbai 400 013

Maharashtra, India

T: +91 (22) 6627 0780

F: +91 (22) 6627 0780 Extn: 8


 Brooks Instrument

Zur Wetterwarte 50

Gebaude 337/B

01109 Dresden Germany

T: +49 (0) 351 2152 040

F: +49 (0) 351 2152 0425

Europe, Middle East & Africa

Brooks Instrument

Neonstraat 3

6718 WX Ede


T: +31 (0) 318 549300

F: +31 (0) 318 549309 BrooksEU@BrooksInstrument.com


 Brooks Instrument Japan

1-4-4 Kitasuna Koto-Ku

Tokyo, 136-0073 Japan

T: +81 (3) 5633 7100

F: +81 (3) 5633 7101



 Brooks Instrument Singapore

18 Boon Lay Way

#04-136 Tradehub 21

Singapore 609966

T: +65 6595 5168

F: +65 6595 5169



Brooks Instrument Korea

D-406, Bundang Techno Park

#151 Yatap-dong, Bundang ku


Kyungki-do, Korea 463-050

T: +82 (31) 708 2521

F: +82 (31) 708 2595

This text was reproduced under the Creative Commons Attribution/Share-Alike License; additional terms may apply. See Terms of use for details


Leave a Reply

Fill in your details below or click an icon to log in:

WordPress.com Logo

You are commenting using your WordPress.com account. Log Out /  Change )

Google+ photo

You are commenting using your Google+ account. Log Out /  Change )

Twitter picture

You are commenting using your Twitter account. Log Out /  Change )

Facebook photo

You are commenting using your Facebook account. Log Out /  Change )


Connecting to %s

%d bloggers like this: