Home » Brooks Instrument » MultiFlo™ Capable Mass Flow Controllers and Meters

MultiFlo™ Capable Mass Flow Controllers and Meters

MultiFlo™ Capable Mass Flow Controllers and Meters

MultiFlo™ Capable Mass Flow Controllers and Meters

GF100 Series mass flow measurement and control

Designed for semiconductor, MOCVD and other gas flow control applications that require a high-purity, all-metal flow path, the Brooks GF Series mass flow controllers deliver outstanding performance, reliability and flexibility. The GF Series has been marathon-tested to over three times the semiconductor industry standard for reliability, ensuring repeatable low-drift performance over time.

  • Ultra-fast 300-millisecond settling time
  • Optional pressure transient insensitive (PTI), high accuracy and safe delivery system models available
  • MultiFlo™ gas and range configurability
  • Corrosion-resistant Hastelloy® sensor tube and valve orifice (jet)

GF40/80 mass flow measurement and control

Designed for solar thin film deposition, CVD, vacuum processes, bioreactors and other industrial gas flow control applications that require cost-efficient solutions.

  • Elastomer or metal seal
  • Fast sub 1 second settling time
  • MultiFlo gas and range configurability
  • Corrosion-resistant Hastelloy sensor tube

MultiFlo™ Capable Mass Flow Controllers and Meters Table1

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