Brooks offers a new generation of displays for on-tool gas panel applications and ruggedized displays for off-tool and bulk gas delivery applications. Our high-visibility displays provide local readout of pressure components for optimal point-of-application monitoring. Our multi-channel controllers provide programmable alarms and set points for monitoring pressure and liquid levels, while the instant and accurate readout at the component allows customers to troubleshoot and make necessary corrections immediately. Brooks displays can be used for applications that include bulk gas, gas cabinets, gas distribution, wafer polishing, epitaxial layer, oxidation, CVD, ion implant, diffusion, PVD and dry etch.
LR056 Pressure Transducer Displays
Local display of process pressure improves safety and quality control of the gas delivery systems. The LR056 series pressure transducer display allows a 4-20mA sensor to digitally display its pressure and send its signal to a final destination. A sensor, such as the SolidSense II pressure transducers and transmitters, connects to either the back or bottom of the LR056 with a 4-pin Bendix connector. The LR056 connects to the loop through either a 6-wire pigtail cable or a 4-pin mail Bendix connector. The LR056 offers a real time reading. It is loop powered, single channeled. The LR056 has two user programmable setpoints which define a window – if the window is entered or left an output signal is generated.